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Praecis Environment-9 Complete System Installation:

Application: Temperature control and HEPA filtration for interferometer used for the metrology of extreme-precision EUV optics.

Customer: Research and development laboratory.

Temperature Control Results:

Critical Point held at ± 0.01 ºC with an ambient temperature of 20 ºC ± 0.5 ºC.

Sub-Systems:

  • ATCU-9 with HEPA filtration.
  • Freestanding enclosure, located in pressurized clean room environment.
  • Porous fabric air distribution plenum suspended from the ceiling of the enclosure.
  • Vibration-isolation granite surface plate.

Enclosure Description:

  • Lightweight, free-standing powder-coated aluminum support structure. Casters for portability.
  • Clear vinyl strip (200 mm wide) wall construction for ease of access, IR energy reflection.
  • Inner chamber segregated from outer chamber with PVC curtains to maintain “onion-skin” isolation.
  • For easy access to the enclosure, PVC panels are attached with Velcro.

Enclosure Size: 

2.0 x 1.6 x 2.0 m (W x D x H) (inside enclosure)
Footprint: 3.2 m²
Volume: 6.3 m³
Air Velocity: 0.28 m/sec

Comment: 

The two-layer approach within the enclosure provided extreme temperature control in the pressurized clean room.

Praecis Environment-9 Complete System. View 1. Inner chamber segregated from outer chamber with curtains to maintain “onion-skin” isolation.

Praecis Environment-9 Complete System. View 1. Inner chamber segregated from outer chamber with curtains to maintain “onion-skin” isolation.

Praecis Environment-9 Complete System. View 2. Outer curtains removed showing inner enclosure.

Praecis Environment-9 Complete System. View 2. Outer curtains removed showing inner enclosure.

Praecis Environment-9 Complete System. View 3.

Praecis Environment-9 Complete System. View 3.